Product Category

Low flow gas Flow Meter/Mass Flow Controller

Low flow gas Flow Meter/Mass Flow Controller

  • Ultra low flow meter

    Ultra low flow meter

    What is ultra low flow meter?An ultra-low flow meter is a type of flow meter designed specifically for measuring extreme...

  • Low flow meters for oil

    Low flow meters for oil

    Silver Instruments is specialist in micro to low flow rate measurement for oil, we supply volumetric or mass flow meters...

SRK-DL Series low flow mass flow meter and flow controller can measure gas ultra low rate as low as 2 sccm (2 ml/min). Ultra low flow meter is commonly used in various applications such as gas chromatography, gas analysis, laboratory research, and industrial processes where precise gas flow measurements are required, it can be used as oxygen low flow meter, low flow rate air flow meter, flow meters for Nitrogen (N2) low flow applications, biogas very low flow meter, ultra low flow meter for CO2, etc.

Low flow thermal gas flow meter/ flow controller Working Principle

The low flow rate mass flow controller consists of a low flow mass flow sensor, a laminar flow layering device, a flow controller regulating valve, and an amplification control circuit. It is made by using the heat transfer distribution effect of flowing fluid to change the temperature distribution of the measured capillary wall.
This low flow mass flow controller uses the principle of differential temperature calorimetry before and after capillary heat transfer to measure the mass flow of gas as low as 2 sccm, independent of temperature and pressure. Amplify the flow signal measured by the sensor, and then compare it with the set voltage. Use the difference to drive the control regulating valve, and closed-loop control the flow through the channel to make it equal to the set flow.

Low flow flowmeter/ flow controller specifications

  • Gas Flow Range: 2 SCCM~ 30 SL/M, such as 100 ml/min, 200 sccm,1 LPM, 2 SLM,5 liter /minute,20 SLPM .
  • Turn Down Ratio: 50:1 for digital mass flow controller; 100:1 for digital mass flow meter;
  • Accuracy : ± 1% F.S
  • Linearity : ± 0.5% F.S
  • Repeatability:± 0.2% F.S
  • Response Time: mass flow controller < 2s; mass flow meter <0.8s
  • Communication: RS232/485.MODBUS
  • Output: 0~5V,4-20mA,1-5V
  • Power Supply :  ±15VDC,24VDC
  • Operation Temperature:  0~50°C
  • Max operation pressure:  3MPa/10MPa
  • Mass flow sensor or flow controller material : Stainless steel
  • Low flow flow meter process connection: Φ3, Φ6, 1/8”, 1/4”
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